SHANGHAI ROYAL TECHNOLOGY INC.
| Payment Terms | L/C,D/A,D/P,T/T |
| Supply Ability | 6 sets per month |
| Delivery Time | 16 weeks |
| Packaging Details | Export standard, to be packed in new cases/cartons, suitable for long-distance ocean/air and inland transportation. |
| Deposition Sources | DC / MF Sputtering Cathodes |
| Technique | PECVD, Balanced/Unbalanced Magentron Sputtering Cathode |
| Applications | Automotive, semiconductor, SiC Coating, DLC film deposition, |
| Film Features | wear resistance, strong adhesion, decorative coating colors |
| Factory Location | Shanghai city, China |
| Worldwide Service | Poland - Europe; Iran- West Asia & Middle East, Turkey, India, Mexico- South America |
| Training Service | Machine operation, maintenance, coating process Recipes, program |
| Warranty | Limited warranty 1 year for free, whole life for machine |
| OEM & ODM | available, we support tailor made design and fabrication |
| Brand Name | ROYAL |
| Model Number | RTSP1200 |
| Certification | ISO, CE, UL standard |
| Place of Origin | Made in China |
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Product Specification
| Payment Terms | L/C,D/A,D/P,T/T | Supply Ability | 6 sets per month |
| Delivery Time | 16 weeks | Packaging Details | Export standard, to be packed in new cases/cartons, suitable for long-distance ocean/air and inland transportation. |
| Deposition Sources | DC / MF Sputtering Cathodes | Technique | PECVD, Balanced/Unbalanced Magentron Sputtering Cathode |
| Applications | Automotive, semiconductor, SiC Coating, DLC film deposition, | Film Features | wear resistance, strong adhesion, decorative coating colors |
| Factory Location | Shanghai city, China | Worldwide Service | Poland - Europe; Iran- West Asia & Middle East, Turkey, India, Mexico- South America |
| Training Service | Machine operation, maintenance, coating process Recipes, program | Warranty | Limited warranty 1 year for free, whole life for machine |
| OEM & ODM | available, we support tailor made design and fabrication | Brand Name | ROYAL |
| Model Number | RTSP1200 | Certification | ISO, CE, UL standard |
| Place of Origin | Made in China | ||
| High Light | thin film coating equipment ，dlc coating equipment | ||
Machine Model: RT1200-FCEV
Technology: with PECVD + PVD Magnetron Sputtering Depositing: Si, Cr, graphite targets, to generate Unbalanced closed magnetic field for high density, high uniformity and excellent corrosion resistance carbon-based film.
This RT1200-FCEV high vacuum magnetron sputtering deposition system is a tailor made model which refers to the model Multi950-R&D which we have built for Shanghai University.
It is designed with Octal chamber, flexible and reliable performances are extensively used in various applications. It satisfy the coating processes require multi different metal layers: Ta, Cr, Si, Graphite, Al, Cr, Cu, Au, Ag, Ni, Sn, SS and many other non-ferromagnetic metals; plus the Ion source unit,
efficiently enhance film adhesion on different substrate materials with its plasma etching performance and the PECVD process to deposit some carbon-based layers.
Equipment Structure:
Vertical orientation, octagonal structure, 2 doors opening (front and back) for easy access.
Equipment Features:
Environmentally friendly system, no hazardous waste
High integration, modular design
Commercialized and standardized for industrial mass production
Extremely efficient ion source for strong adhesion and high ionization
Easy Operation: Touch screen + PLC control, one touch operation
With Royal Technology’s software, process parameters can be programmed, saved and reproduced
Special design of Carousel system for highly uniform deposition
High productivity and stability, working 24/7 a week
Flexible, matches various sizes of plates, for single or double sides coating
PVD & PECVD coating film performance:
To improve the conductivity of surface
High corrosion resistance
High wear resistance
High hardness
Hydrophobic composition film and other functional films
Available for compound coatings: metallic and non-metallic films
Film thickness range from 100nm to 12μm, thickness tolerance ±5% Strong adhesion
Low tempering parts surface hardening treatment
| MODEL | RT1200-FCEV | |||||||||
| MATERIAL | Stainless Steel (S304) | |||||||||
| CHAMBER SIZE | Φ1250*1350mm (H) | |||||||||
| CHAMBER TYPE | Front and back 2-doors structure, Vertical | |||||||||
| SINGLE PUMP PACKAGE | Rotary Piston Vacuum Pump | |||||||||
| Roots Vacuum Pump | ||||||||||
| Magnetic Suspension Molecular Pump | ||||||||||
| Rotary Vane Pump (Holding Pump) | ||||||||||
| TECHNOLOGY | Magnetron Sputtering, Ion Source PECVD | |||||||||
| POWER SUPPLY | Sputtering power supply + Bias Power supply + Ion Source | |||||||||
| DEPOSITION SOURCE | 2 pairs DC/RF Sputtering Cathodes + (2 pairs spare using) + Ion Source | |||||||||
| CONTROL | PLC+Touch Screen | |||||||||
| GAS | Gas Mass Flow Meters ( Ar, N2, C2H2, O2) Argon, Nitrogen and Ethyne,Oxygen | |||||||||
| SAFETY SYSTEM | Numerous safety interlocks to protect operators and equipment | |||||||||
| COOLING | Cooling Water | |||||||||
| CLEANING | Glow Discharge/Ion Source | |||||||||
| POWER MAX. | 150KW | |||||||||
| AVERAGE POWER CONSUMPTION | 75KW | |||||||||
Please contact us for more specifications, Royal Technology is honored to provide you total coating solutions.
Company Details
Business Type:
Manufacturer
Year Established:
2006
Employee Number:
10~49
Ecer Certification：
Verified Supplier
Shanghai Royal Technology Inc. was established in 2006, a worldwide supplier of high quality vacuum equipment with key locations around the globe. Research and Development technology are supported by specialized engineers in the United States and China. High-tech machine manufacturing facilities are... Shanghai Royal Technology Inc. was established in 2006, a worldwide supplier of high quality vacuum equipment with key locations around the globe. Research and Development technology are supported by specialized engineers in the United States and China. High-tech machine manufacturing facilities are...
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