SHANGHAI ROYAL TECHNOLOGY INC.
| Delivery Time | 12 weeks |
| Packaging Details | Export standard, to be packed in new cases/cartons, suitable for long-distance ocean/air and inland transportation. |
| Technology | DC sputter cathodes and thermal evaporated sources |
| Features | 2-doors structure, vertical chamber, for high productivity |
| Factory Location | Shanghai city, China |
| Worldwide Service | Poland - Europe; Iran- West Asia & Middle East, Turkey, India, Mexico- South America |
| Training Service | Machine operation, maintenance, coating process Recipes, program |
| Warranty | Limited warranty 1 year for free, whole life for machine |
| OEM & ODM | available, we support tailor made design and fabrication |
| Brand Name | ROYAL |
| Model Number | RTEP1616-SP |
| Certification | CE, UL Standard |
| Place of Origin | China |
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Product Specification
| Delivery Time | 12 weeks | Packaging Details | Export standard, to be packed in new cases/cartons, suitable for long-distance ocean/air and inland transportation. |
| Technology | DC sputter cathodes and thermal evaporated sources | Features | 2-doors structure, vertical chamber, for high productivity |
| Factory Location | Shanghai city, China | Worldwide Service | Poland - Europe; Iran- West Asia & Middle East, Turkey, India, Mexico- South America |
| Training Service | Machine operation, maintenance, coating process Recipes, program | Warranty | Limited warranty 1 year for free, whole life for machine |
| OEM & ODM | available, we support tailor made design and fabrication | Brand Name | ROYAL |
| Model Number | RTEP1616-SP | Certification | CE, UL Standard |
| Place of Origin | China | ||
| High Light | thin film coating equipment ，thin film deposition equipment | ||
PVD Thin Film Deposition System Sputtering And Thermal Evaporating Vacuum Coating Equipment
PVD Thin Film Deposition System, Sputtering and Thermal Evaporating Vacuum Coating Equipment
PVD Thin Film Deposition System contains the deposition sources of Tungsten filament evaporation source and DC magnetron sputter sources (RF sputtering cathodes are for option). This equipment is mostly used to deposit thin films on plastic parts, glass, metal or foils with the depositing materials like: pure metal Al, Cr, Cu, Ag, Au, Ti etc. Evaporation sources generally to obtain high reflective thin films on products surfaces or conductive films, or give a metallic outlook image. Except that, the sputtering sources condense a wide range of semiconductor materials and dielectrics including transparent conductive oxides, etc.
PVD Thin Film Deposition System Configurations:
Performance
1. Ultimate Vacuum Pressure: better than 5.0×10-6 Torr.
2. Operating Vacuum Pressure: 1.0×10-4 Torr.
3. Pumping down Time from 1 atm to 1.0×10-4 Torr≤3 minutes ( room temperature, dry, clean and empty chamber)
4. Metalizing material ( evaporation): Al, Cr, Sn, Ti, SS, Cu… etc.
5. Operating Model: Full Automatically /Semi-Auto/ Manually
lStructure
The vacuum coating machine contains key completed system listed below:
1. Vacuum Chamber
1.1 Size: Inner Diameter 1600mm
Inner Height 1600mm
1.2 Material: Vacuum Chamber SUS304 (SS41 mild steel for option)
Door and flanges SUS304 (SS41 mild steel for option)
Chamber strengthen structure: SS41 mild steel, with painted finishing surface treatment.
Chamber chassis SS41 mild steel with painted finishing surface treatment.
1.3 Shield: SUS304
1.4 View Window: on chamber door
1.5 Vacuum Chamber Venting Valve, including silencer
1.6 Door SUS304 material
2. Rouhging Vacuum Pumping System
3. High Vacuum Pumping System
4. Electrical Control and Operation System- PLC+ Touch Screen
4.1 Main circuit: None-fuse breaker switch, electromagnetic switch, C/T in series type
4.2 Evaporation Power: 35kVA
4.3 Evaporation Control System
4.4 Operation System: Touch Screen + PLC, recipe control and data logging, Auto shutdown, auto evacuation, auto coating
4.5 Vacuum Pressure Measuring System
Vacuum Gauge: Pirani + Penning gauge
Thermocouple Gauge: 760 Torr ~ 5*10-4 Torr
4.6 Alarm System: Compressed air pressure , Cooling water flow, Mis-operation
4.7 Power Load Indicator: Voltage indicator and load current indicator
5. Deposition System
5.1 Tungsten filament evaporation source
5.2 Thermal evaporation materials: wires, rings, rods etc.
5.3 Sputter sources (DC/MF power driven)
6. Sub-System
6.1 Air Compressed Valve Control System
6.2 Cooling Water System-Water flow pipe and switch valve system
Learn more about the machine and applications available, please contact us now.
Company Details
Business Type:
Manufacturer
Year Established:
2006
Employee Number:
10~49
Ecer Certification：
Verified Supplier
Shanghai Royal Technology Inc. was established in 2006, a worldwide supplier of high quality vacuum equipment with key locations around the globe. Research and Development technology are supported by specialized engineers in the United States and China. High-tech machine manufacturing facilities are... Shanghai Royal Technology Inc. was established in 2006, a worldwide supplier of high quality vacuum equipment with key locations around the globe. Research and Development technology are supported by specialized engineers in the United States and China. High-tech machine manufacturing facilities are...
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