SHANGHAI ROYAL TECHNOLOGY INC.
| Payment Terms | L/C,T/T |
| Supply Ability | 10 sets per month |
| Delivery Time | 14~16weeks |
| Packaging Details | Export standard, to be packed in new cases/cartons, suitable for long-distance ocean/air and inland transportation. |
| Equipment Model | Polyhedron structure |
| Deposition Sources | arc + DC/MF sputtering |
| Technology | PECVD process, PVD plating |
| Material | SS304/SS316L |
| Applications | DLC, Hard films, optical film coating by Magnetron Sputtering |
| Factory Location | Shanghai city, China |
| Worldwide Service | Poland - Europe; Iran- West Asia & Middle East, Turkey, India, Mexico- South America |
| Training Service | Machine operation, maintenance, coating process Recipes, program |
| Warranty | Limited warranty 1 year for free, whole life for machine |
| OEM & ODM | available, we support tailor made design and fabrication |
| Brand Name | ROYAL |
| Model Number | Multi950 |
| Certification | CE |
| Place of Origin | China |
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Product Specification
| Payment Terms | L/C,T/T | Supply Ability | 10 sets per month |
| Delivery Time | 14~16weeks | Packaging Details | Export standard, to be packed in new cases/cartons, suitable for long-distance ocean/air and inland transportation. |
| Equipment Model | Polyhedron structure | Deposition Sources | arc + DC/MF sputtering |
| Technology | PECVD process, PVD plating | Material | SS304/SS316L |
| Applications | DLC, Hard films, optical film coating by Magnetron Sputtering | Factory Location | Shanghai city, China |
| Worldwide Service | Poland - Europe; Iran- West Asia & Middle East, Turkey, India, Mexico- South America | Training Service | Machine operation, maintenance, coating process Recipes, program |
| Warranty | Limited warranty 1 year for free, whole life for machine | OEM & ODM | available, we support tailor made design and fabrication |
| Brand Name | ROYAL | Model Number | Multi950 |
| Certification | CE | Place of Origin | China |
| High Light | silver plating machine ，vacuum plating equipment | ||
The integration of PVD and PECVD technologies in a hybrid coating machine provides a range of advantages that can lead to improved coating quality, versatility, control, efficiency, cost savings, customization, and environmental sustainability.
The Multi950 is the milestone of advanced design coating systems for Royal Tech. Here, we grateful thanks Shanghai University students and especially Process Yigang Chen, his creative and selfless dedication are unlimited values and inspired our team.
In year 2018, we had another project cooperation with Pressor Chen, the C-60 material deposition by
Inductive thermal evaporation method. We heartfully thank Mr. Yimou Yang and Professor Chen's leading and instruction on every innovative project.
Multi950 machine properties:
Compact Footprint,
Standard Modular Design,
Flexible,
Reliable,
Octal Chamber,
2-door structure for good access,
PVD + PECVD processes.
Design Features:
1. Flexibility: Arc and sputtering cathodes, Ion source mounting flanges are standardized for flexible exchange;
2. Versatility: can deposit variety of base metals and alloys; optical coatings, hard coatings, soft coatings, compound films and solid lubricating films on the metallic and non-metallic materials substrates.
3. Straight forward design: 2-door structure, front & back opening for easy maintenance.
The Multi950 machine is a customized multiple functions vacuum deposition system for R&D. With half year’s discussion with Shanghai University’s team leaded by Professor Chen, we finally confirmed the design and configurations to fulfill theirs R&D applications. This system is able to deposit transparent DLC film with PECVD process, hard coatings on tools, and optical film with sputtering cathode. Based on this pilot machine design concept, we have developed 3 other coating systems after then:
1. Bipolar Plate Coating for Fuel Cell Electric Vehicles- FCEV1213,
2. Ceramic Direct Plated Copper- DPC1215,
3. Flexible Sputtering System- RTSP1215.
These 4 models machine are all with Octal chamber, flexible and reliable performances are extensively used in various applications. It satisfy the coating processes require multi different metal layers: Al, Cr, Cu, Au, Ag, Ni, Sn, SS and many other non-feeromagnetic metals;
plus the Ion source unit, efficiently enhance films adhesion on different substrate materials with its plasma etching performance and, the PECVD process to deposit some carbon-based layers.
Multi950 - Technical Specifications
| Description | Multi-950 |
|
Deposition chamber (mm) Width x Depth x Heigh |
1050 x 950 x 1350 |
|
Deposition Sources |
1 pair of MF sputtering cathodes |
| 1 pair of PECVD | |
| 8 sets arc cathodes | |
| Linear Ion Source | 1 set |
| Plasma Uniformity Zone (mm) | φ650 x H750 |
| Carousel | 6 x φ300 |
|
Powers (KW) |
Bias: 1 x 36 |
| MF: 1 x 36 | |
| PECVD: 1 x36 | |
| Arc: 8 x 5 | |
| Ion Source: 1 x 5 | |
| Gas Control System | MFC: 4 + 1 |
| Heating System | 500℃, with thermalcouple PID control |
| High Vacuum Gate Valve | 2 |
| Turbomolecular pump | 2 x 2000L/S |
| Roots Pump | 1 x 300L/S |
| Rotary Vanes Pump | 1 x 90 m³/h + 1 x 48 m³/h |
| Footprint (L x W x H ) mm | 3000 * 4000 * 3200 |
| Total Power (KW) | 150 |
Royal Tech's service and engineering teams provide customer support onsite, contact us for your applications!
Company Details
Business Type:
Manufacturer
Year Established:
2006
Employee Number:
10~49
Ecer Certification：
Verified Supplier
Shanghai Royal Technology Inc. was established in 2006, a worldwide supplier of high quality vacuum equipment with key locations around the globe. Research and Development technology are supported by specialized engineers in the United States and China. High-tech machine manufacturing facilities are... Shanghai Royal Technology Inc. was established in 2006, a worldwide supplier of high quality vacuum equipment with key locations around the globe. Research and Development technology are supported by specialized engineers in the United States and China. High-tech machine manufacturing facilities are...
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