SHANGHAI ROYAL TECHNOLOGY INC.
| Supply Ability | 10 sets per month |
| Delivery Time | 10~12 weeks |
| Packaging Details | Export standard, to be packed in new cases/cartons, suitable for long-distance ocean/air and inland transportation. |
| Technology | Pulsed Closed Field Unbalanced Magnetron Sputtering |
| Targets | Ta, Ni, Cr, Ti, Au, Ag, SS, Cu, Zr, Al etc. |
| Warranty | Limited warranty 1 year for free, whole life for machine |
| Coating | PVD Machine, Vacuum Coating |
| After-sales service provided | Engineers available to service machinery overseas, maintenance and repair service, installation, commissioning and training, Video technical support |
| Application | Industrial massive production, Lab R&D |
| Factory Location | Shanghai city, China |
| Worldwide Service | Poland - Europe; Iran- West Asia & Middle East, Turkey, India, Mexico- South America |
| Training Service | Machine operation, maintenance, coating process Recipes, program |
| OEM & ODM | available, we support tailor made design and fabrication |
| Brand Name | ROYAL |
| Model Number | RTSP1000 |
| Certification | CE |
| Place of Origin | China |
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Product Specification
| Supply Ability | 10 sets per month | Delivery Time | 10~12 weeks |
| Packaging Details | Export standard, to be packed in new cases/cartons, suitable for long-distance ocean/air and inland transportation. | Technology | Pulsed Closed Field Unbalanced Magnetron Sputtering |
| Targets | Ta, Ni, Cr, Ti, Au, Ag, SS, Cu, Zr, Al etc. | Warranty | Limited warranty 1 year for free, whole life for machine |
| Coating | PVD Machine, Vacuum Coating | After-sales service provided | Engineers available to service machinery overseas, maintenance and repair service, installation, commissioning and training, Video technical support |
| Application | Industrial massive production, Lab R&D | Factory Location | Shanghai city, China |
| Worldwide Service | Poland - Europe; Iran- West Asia & Middle East, Turkey, India, Mexico- South America | Training Service | Machine operation, maintenance, coating process Recipes, program |
| OEM & ODM | available, we support tailor made design and fabrication | Brand Name | ROYAL |
| Model Number | RTSP1000 | Certification | CE |
| Place of Origin | China | ||
| High Light | magnetron sputtering equipment ，vacuum deposition equipment | ||
Closed field unbalanced magnetron sputtering deposition system, Unbalanced Magnetron Sputtering Ion Plating
Unbalanced and closed field magnetron processes have all the advantages of planar magnetrons. Additional advantages and disadvantages are:
Unbalanced and closed field magnetron sputtering revolutionized properties achievable by magnetron sputtering processes. As successful with improved thin film tribological, corrosion resistance and optical properties as this technology was, improvements in magnetron technology had just begun. Next Blog we move onto rotating and cylindrical magnetron processes and resulting thin film applications.
--- Above Artical from P E T E R M A R T I N
Royal technology developed high yield and high target utilization sputtering cathodes, especially for rare and expensive metals sputtering: Au Gold, Ta Tantalum, Ag silver metal films deposition. The high uniformity film's deposition system have been serving several industries like Electronics parts, medical instruments components which require high film uniformity, multiple layers deposition.
The RTSP1000 machine is a standardized machine developed by Royal technology. Extensive applied with cutting/forming tools, molds, medical instruments, electronics components, automotive industries.
| RTSP1000 Main Configurations and Technical Parameters | ||||||||
| MODEL | RTSP1000 | |||||||
| TECHNOLOGY | MF magnetron sputtering + ion source plasma cleaning | |||||||
| CHAMBER MATERIAL | Stainless Steel (S304) | |||||||
| CHAMBER SIZE | Φ1000*800mm (H) | |||||||
| CHAMBER TYPE | D shape | |||||||
| ROTATION RACK & JIG SYSTEM | 6 satellites Max. weight: 500kgs | |||||||
| POWER SUPPLIES | Qty. of Sputtering: 2*24 KW Bias of Power Supply: 1*20W Ion Source Power supply 1*5KW | |||||||
| DEPOSITION MATERIAL | Ti/Cr/TiAl /Ta/Cu/Au/Carbon etc. | |||||||
| DEPOSITION SOURCE | 2 pairs (4 pieces) Planar Sputtering Cathodes + 1 Linear Ion Source Uniformity Area: ±10~15% | |||||||
| CONTROL | PLC(Programmable Logic Controller) + Touch Screen ( manual+ auto+ semi-auto operation models) | |||||||
| PUMP SYSTEM | Rotary Vane Pump: SV300B - 1 set (Leybold) | |||||||
| Roots Pump: WAU1001- 1 set (Leybold) | ||||||||
| Holding Pump: D60C- 1 set (Leybold) | ||||||||
| Magnetic Suspension Molecular Pump - 1 set (Leybold) | ||||||||
| GAS MASS FLOW CONTROLLER | 4 channels, Made in China, Seven Star (CS series, ) digital model | |||||||
| VACUUM GAUGE | Model: ZDF-X-LE, Made in China: ZDF-X-LE | |||||||
| LINEAR ION SOURCE | 1 piece Pre-treating, plasma cleaning + assisted deposition | |||||||
| SAFETY SYSTEM | Numerous safety interlocks to protect operators and equipment | |||||||
| HEATING | Heaters: 30KW. Max. temp.: 450℃ | |||||||
| COOLING | Industrial Chiller (Cold Water) | |||||||
| POWER MAX. | 100KW (Approx.) | |||||||
| AVERAGE POWER CONSUMPTION | 45 KW (Approx.) | |||||||
| GROSS WEIGHT | T (Approx.) | |||||||
| FOOT PRINT | ( L*W*H) 4000*4000 *3200 MM | |||||||
| POWER ELECTRICAL | AC 380V/3 phases/50HZ / 5 lines | |||||||
High target utilization planar sputtering deposition: please CLICK HERE to watch the video
Linear Ion Source Plasma Cleaning and Assisted Deposition: please CLICK HERE to watch video
Please contact us for more specifications, Royal Technology is honored to provide you total coating solutions.
Company Details
Business Type:
Manufacturer
Year Established:
2006
Employee Number:
10~49
Ecer Certification：
Verified Supplier
Shanghai Royal Technology Inc. was established in 2006, a worldwide supplier of high quality vacuum equipment with key locations around the globe. Research and Development technology are supported by specialized engineers in the United States and China. High-tech machine manufacturing facilities are... Shanghai Royal Technology Inc. was established in 2006, a worldwide supplier of high quality vacuum equipment with key locations around the globe. Research and Development technology are supported by specialized engineers in the United States and China. High-tech machine manufacturing facilities are...
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