Zhengzhou Brother Furnace Co.,Ltd
| Payment Terms | L/C, T/T, Western Union |
| Supply Ability | 200 Sets per month |
| Delivery Time | 7-21 Working days |
| Packaging Details | Strong wooden box for global shipping |
| Max Temperature | 1200℃ |
| Normal vacuum | -0.1MPa |
| Max Vacuum | Configuration molecular pump, Vacuum 7x10-4 Pa (Optional) |
| Flange | 304 stainless steel sealing flange |
| Over-temperature protection | automatic power-off when the temperature exceeds the allowable set value |
| Safety protection | Automatically power off when the furnace body leaks |
| Furnace structure | double layer steel dual cooling fan, surface temperature below 50℃ |
| Max Heating rate | 20°C /min |
| TEMPERATURE ACCURACY | ±1℃ |
| TEMPERATURE UNIFORMITY | ±5℃ |
| Temperature Control | 50 Segments programmable and auto control |
| Furnace tube | Quartz tube |
| Application | Plasma Enhanced LPCVD |
| Brand Name | Brother Furnace |
| Model Number | BR-PECVD |
| Certification | CE |
| Place of Origin | China |
View Detail Information
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Product Specification
| Payment Terms | L/C, T/T, Western Union | Supply Ability | 200 Sets per month |
| Delivery Time | 7-21 Working days | Packaging Details | Strong wooden box for global shipping |
| Max Temperature | 1200℃ | Normal vacuum | -0.1MPa |
| Max Vacuum | Configuration molecular pump, Vacuum 7x10-4 Pa (Optional) | Flange | 304 stainless steel sealing flange |
| Over-temperature protection | automatic power-off when the temperature exceeds the allowable set value | Safety protection | Automatically power off when the furnace body leaks |
| Furnace structure | double layer steel dual cooling fan, surface temperature below 50℃ | Max Heating rate | 20°C /min |
| TEMPERATURE ACCURACY | ±1℃ | TEMPERATURE UNIFORMITY | ±5℃ |
| Temperature Control | 50 Segments programmable and auto control | Furnace tube | Quartz tube |
| Application | Plasma Enhanced LPCVD | Brand Name | Brother Furnace |
| Model Number | BR-PECVD | Certification | CE |
| Place of Origin | China | ||
| High Light | rotating tube furnace ，quartz tube furnace | ||
Standard Spares:
Optional Spares:
Lab PECVD Split Tube Furnace Standard specification:
| 1. Heating System | ||
| Max.temperature | 1200℃ (1 hour) | |
| Working temperature | ≤1100℃ | |
| Chamber size | Φ100*1650mm (Tube diamater is customizable) | |
| Chamber material | High purity alumina fiber board | |
| Thermocouple | K type | |
| Temperatureaccuracy | ±1℃ | |
| Temperature control |
● 50 programmable segments for precise control of heating rate, cooling rate and dwell time. ● Built in PID Auto-Tune function with overheating & broken thermocouple broken protection. ● PLC automatic control system by PC controller inside. ● The temperature control system, sliding system (Time and Distance) could be controlled by program. |
|
| Heating length | 440mm | |
| Constant heating length | 200mm | |
| Heating element | Resistance wire | |
| Power supply | Single phase, 220V, 50Hz | |
| Rated power | 9kW | |
| 2. RF Plasma Source | ||
| RF frequency | 13.56 MHz±0.005% | |
| Output power | 500W | |
| Max reflect power | 500W | |
| RF output interface | 50 Ω, N-type, female | |
| Power stability | ±0.1% | |
| Harmonic component | ≤-50dbc | |
| Supply voltage/Frequency | Single phase AC220V 50/60HZ | |
| Whole efficiency | >=70% | |
| Power factor | >=90% | |
| Cooling method | Forced air | |
| 3. Three precision mass flowmeters control system | ||
| External dimension | 600x600x650mm | |
| Connector type | Swagelok SS joint | |
| Standard range (N2) | 0~100sccm, 0~200sccm, or customizable | |
| Accuracy | ±1.5% | |
| Linear | ±0.5～1.5% | |
| Repeatability | ±0.2% | |
| Response time |
Gas property: 1～4 Sec; |
|
| Pressure range | 0.1～0.5 MPa | |
| Max.pressure | 3MPa | |
| Interface | Φ6,1/4'' | |
| Display | 4 digit display | |
| Ambient temperature | 5~45 high purity gas | |
| Pressure gauge | －0.1～0.15 MPa, 0.01 MPa/unit | |
| Stop valve | Φ6 | |
| Polish SS tube | Φ6 | |
| Low vacuum system included | ||
Why Brother's Lab PECVD Split Tube Furnace?
Customers from more than 30 countries choose us
Best service, Fast response
If you're interested in our 1200℃ Plasma Enhanced LPCVD Furnace with Vacuum Pump, contact us now to get a quote!
Company Details
Business Type:
Manufacturer,Exporter
Year Established:
1998
Total Annual:
300M-600M
Employee Number:
100~200 People
Ecer Certification：
Verified Supplier
Brother furnace is the leading manufacturer of lab furnace, industrial furnace, heating elements in China. As a manufacturer with more than 17 years’ experience in thermal engineering, Brother Furnace offers the wide and deep range of furnaces worldwide. Satisfied customers in more t... Brother furnace is the leading manufacturer of lab furnace, industrial furnace, heating elements in China. As a manufacturer with more than 17 years’ experience in thermal engineering, Brother Furnace offers the wide and deep range of furnaces worldwide. Satisfied customers in more t...
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