Water Cooling Magenetically Levitated Pump Heating Temperature Control System

Product Specification

Maglev Pump, CXF-250/2301, ISO-K/CF , Water cooling On Board

The magnetically levitated molecular pumps are the pumps of which shafting is supported by virtue of magnetic force, meeting application requirements for fields of modern semiconductor manufacturing, chip manufacturing, industrial plating and scientific instruments.

Technologies:

• Control Technology for Magnetic Bearing: a 5-axis magnetically levitated, based on advanced international control theory, to guarantee such significant advantages of the high-speed shafting as stable levitated and reliable operation.
• Motor Drive Control Technology: High-efficiency high-speed DC motor and servo control system,  haveing maximum energy of the motor and to compensate the rotating speed of shafting automatically, thereby realizing stable start-up, reliable operation and automatic regulating function of dynamic energy.
• Carbon fiber composite rotor technology: Made by compounding high-strength aluminum alloy and light-weight carbon fiber. characterized of great reduction of weight and great improvement of strength, so that targets of high rotating speed, high performance and high reliability are achieved.
• Corrosion resisting technology: Surfaces of parts in chambers are treated with special process, so that the surfaces can resist corrosion caused by corrosive gases in semiconductor manufacturing processes for a long time. In addition,  inert gases such as N2 are fully filled in shafting of the pumps to protect the low vacuum parts in the pumps, so that function of stably exhausting corrosive gases for long periods is realized.
• Heating temperature control system: equipped with an electric heater and a temperature controller, cooling water, air-bone heating, electric heating and heat carried by protective gases can be monitored and controlled during operation, temperature in the pumps can be maintained at some value for long term, some gaseous substances are not converted into solid substances at normal temperature and not deposited in the pumps, and requirements for special process such of etching can be met.

The advantages:

This Pumps have advantages, such as Zero friction during operation, and low power consumption, Easy to acquire really clean high vacuum and ultrahigh vacuum without lubrication for pumps, Capable of extracting corrosive gases for long term, High safety and long service life due to protection of bearings with precision ceramic balls and power generating function in case of sudden power-off. It has advatages as free of friction, pollution and maintenance and with low vibration, and can be installed in any orientation.

Applications:

Extraction of corrosive gases existing in etch, CVD, PVD and ion implantation and gases easily coagulated at normal temperature in the fields of semiconductor manufacturing, clip manufacturing, industrial plating and scientific instruments, especially to.

Specifications: