Packaging Details | wooden case packing |
Supply Ability | 30 Piece/Pieces per Quarter |
Delivery Time | 60 days |
place of origin | Hunan, China |
type | Induction Furnace |
usage | deposition furnace |
video outgoing-inspection | Provided |
machinery test report | Provided |
core components | PLC |
brand name | Jingtan |
voltage | 380 |
weight (t) | 2 T |
power (kw) | 220 |
key selling points | Competitive Price |
Design Temperature (℃) | 1250-2200 |
Woring temperature | 900-1200℃ |
Pressure rise rate (Pa/h) | 0.67Pa/h(150Pa/24h) |
Heating method | Resistance/induction |
Working atmosphere | vacuum/CH4/C3H6/H2/N2/Ar |
Furnace type | Square/roundVertical/Horizontal |
Furnace cooling mode | furnace shell water cooling |
Infrared instrument | single/double colorimetric |
Temperature uniformity | ±5 |
Limit vacuum Degree(Pa) | 1-100 |
Marketing Type | Ordinary Product |
Warranty of core components | 1 Year |
Applicable Industries | Other, semiconductor |
Brand Name | Jingtan |
Certification | CE |
View Detail Information
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Product Specification
Packaging Details | wooden case packing | Supply Ability | 30 Piece/Pieces per Quarter |
Delivery Time | 60 days | place of origin | Hunan, China |
type | Induction Furnace | usage | deposition furnace |
video outgoing-inspection | Provided | machinery test report | Provided |
core components | PLC | brand name | Jingtan |
voltage | 380 | weight (t) | 2 T |
power (kw) | 220 | key selling points | Competitive Price |
Design Temperature (℃) | 1250-2200 | Woring temperature | 900-1200℃ |
Pressure rise rate (Pa/h) | 0.67Pa/h(150Pa/24h) | Heating method | Resistance/induction |
Working atmosphere | vacuum/CH4/C3H6/H2/N2/Ar | Furnace type | Square/roundVertical/Horizontal |
Furnace cooling mode | furnace shell water cooling | Infrared instrument | single/double colorimetric |
Temperature uniformity | ±5 | Limit vacuum Degree(Pa) | 1-100 |
Marketing Type | Ordinary Product | Warranty of core components | 1 Year |
Applicable Industries | Other, semiconductor | Brand Name | Jingtan |
Certification | CE | ||
High Light | Deposition Equipment For Semiconductor Material ,CVD Furnace For Semiconductor Material |
Parameter /Model No. | JT-0305-C | JT-0505-C | JT-0608-C | JT-0608-C | JT-0812-C | JT-1120-C | JT-1218-C | JT-1520-C |
Working Zone Size φ×H(mm) | 300×500 | 500×500 | 600×800 | 600×1200 | 800×1200 | 1100×2000 | 1200×1800 | 1500×2000 |
Highest Temperature (℃) | 2300 | 2300 | 2300 | 2300 | 2300 | 2300 | 2300 | 2300 |
Temperature uniformity(℃) | ±5 | ±5 | ±5/±7.5 | ±7.5/±10 | ±7.5/±10 | ±10/±15 | ±10/±15 | ±15/±20 |
Limit Vacuum Degree(Pa) | 1-100 | 1-100 | 1-100 | 1-100 | 1-100 | 1-100 | 1-100 | 1-100 |
Limit Vacuum Degree(Pa) | 0.67 | 0.67 | 0.67 | 0.67 | 0.67 | 0.67 | 0.67 | 0.67 |
Heating method | Resistance/induction | Resistance/induction | Resistance/induction | Resistance/induction | Resistance/induction | Resistance/induction | Resistance/induction | Resistance/induction |
Design temperature | 1250℃/1650℃/1800℃/2200℃ |
Common temperature | 900~1200℃ |
Vacuum degree | < 50Pa |
Pressure rise rate | 6.67pA /h(or 150Pa/24h) in cold state of empty furnace |
Heating mode | graphite resistance heating or induction heating, independent temperature control, good temperature uniformity |
Atmosphere medium | vacuum /CH4/C3H6/H2/N2/Ar |
Gas control mode | mass flow meter control, multi-channel gas path, uniform flow field, no deposition dead Angle, good deposition effect;Multi-stage and efficient exhaust treatment system, environmentally friendly, easy to clean up |
Furnace type | square, round, vertical or horizontal structure (non-standard design), fully enclosed deposition chamber, good sealing effect, strong anti-pollution ability; |
Furnace cooling mode | furnace shell water cooling, external circulation quick cooling system can be selected, short cooling time, high production efficiency; |
Structure form | horizontal - side discharge, vertical - up/down discharge |
Locking mode | manual/automatic |
Shell material | inner stainless steel/all stainless steel |
Insulation material | carbon felt/graphite felt/carbon fiber cured felt |
Infrared instrument | single colorimetric/double colorimetric |
Power supply | KGPS/IGBT(only suitable for medium frequency heating) Product parameter: |
Company Details
Business Type:
Manufacturer,Exporter
Year Established:
2021
Total Annual:
2million -5million
Employee Number:
40~60
Ecer Certification:
Verified Supplier
Hunan Jingtan Automation Equipment Co., Ltd. was founded in 2021, the production base Zhuzhou Guangjichang Technology Co., Ltd. was founded in 2014, is a high-tech enterprise integrating research and development, production, sales and service, and has become a famous leading manufactur... Hunan Jingtan Automation Equipment Co., Ltd. was founded in 2021, the production base Zhuzhou Guangjichang Technology Co., Ltd. was founded in 2014, is a high-tech enterprise integrating research and development, production, sales and service, and has become a famous leading manufactur...
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