4 Inch 6 Inch High Purity Quartz Crystal Boat SiO2 Wafer Diffusion Processing

Product Specification

4 inch 6 inch High purity Quartz crystal boat SiO2 Wafer diffusion processing High temperature resistance

Product structure

The structure of the quartz crystal boat is mainly composed of silicon tetroxide (SiO2), which is an inorganic compound. Quartz boat has the following characteristics:

• Optical performance: Quartz crystal boat has good light transmission, not only through visible light, but also through ultraviolet and infrared.
• Acid resistance: At high temperatures, quartz crystal boat can withstand sulfuric acid, nitric acid, hydrochloric acid, aqua Regis and other erosion, Quartz crystal boats chemical stability is equivalent to 30 times of acid-resistant ceramics, equivalent to 150 times of nickel-chromium alloy and ceramics.
• High temperature resistance: Quartz crystal boat has good high temperature resistance, can withstand high temperature environment and thermal shock, and its coefficient of thermal expansion is particularly small.

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Product parameter

Product use

Quartz boats have a wide range of applications in a number of fields, including but not limited to the following:

• Electric light source and semiconductor: Quartz crystal boat is used to manufacture high pressure mercury lamp, xenon lamp, tungsten iodide lamp, thallium iodide lamp, infrared lamp and germicidal lamp and other light sources. In the production process of semiconductor materials and devices, quartz crystal boats are used as crucible, boat, furnace core tube and bell jar for growing germanium and silicon single crystals.

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• Optical technology: The excellent optical properties of quartz crystal boat make Quartz crystal boat widely used in sound, light and electricity. It is used in the manufacture of ultrasonic delay lines on radar, infrared tracking direction finding, infrared photography, communications, spectrographs, spectrophotometers, prisms, lenses, and reflective Windows for large astronomical telescopes.
• Chemical, metallurgical and electrical: quartz crystal boat in the chemical field can be used for high-temperature acid-resistant gas combustion, cooling and ventilation devices, evaporation of acidic solutions, cooling suction collection, storage devices, etc. In metallurgy, Quartz crystal boat can be used in optical glass, crucible fluorescent body, electric furnace core tube and gas combustion radiator. In electrical engineering, quartz boats can be used to manufacture nose cones, nozzles and radomes for rockets and missiles, as well as radio insulation parts for artificial satellites.
• Scientific research: Quartz crystal boats are also widely used in the field of scientific research, such as for radioactive devices, thermal scales, vacuum adsorption devices, precision casting and so on.

​Experiments and processes applicable to the product​

Quartz crystal boat is an important consumable for semiconductor manufacturing process, mainly used for carrying wafers, transferring chips and cleaning processes. Here are some of the experiments and processes for which the quartz boat is suitable:

1. Diffusion process: One of the main applications of quartz boat in semiconductor process is diffusion process. In the diffusion process, multiple wafers are placed on a quartz boat, which is then placed in a furnace tube for batch fabrication.
2. Etching process: Quartz crystal boat is also suitable for etching process. In the etching process, the quartz crystal boat can be used as a tool to carry the chip, and the chip is placed on the crystal boat for etching treatment.
3. Cleaning process: Quartz crystal boats can also be used in the cleaning process of semiconductor processes. During the cleaning process, the crystal boat can be used to carry the chip and placed in the cleaning tank for cleaning.

In SUMMARY:

Quartz boat is suitable for diffusion process, etching process and cleaning process in semiconductor process. It can be used to carry wafers, transfer chips and clean processes.