Shanghai GaNova Electronic Information Co., Ltd.
| Payment Terms | T/T |
| Delivery Time | 8-10week days |
| Product Name | Rapid Thermal Annealing System |
| Model | RTP-150RL |
| Maximum sample size | 150mm |
| Process gases | three sets |
| Software control system | RL900 |
| temperature control | Tube power PID |
| Brand Name | GaNova |
| Model Number | JDEQ-0002 |
| Place of Origin | Suzhou China |
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Product Specification
| Payment Terms | T/T | Delivery Time | 8-10week days |
| Product Name | Rapid Thermal Annealing System | Model | RTP-150RL |
| Maximum sample size | 150mm | Process gases | three sets |
| Software control system | RL900 | temperature control | Tube power PID |
| Brand Name | GaNova | Model Number | JDEQ-0002 |
| Place of Origin | Suzhou China | ||
| High Light | 150mm Rapid Thermal Annealing System ，desktop rapid thermal processing equipment ，Wafer Rapid Thermal Annealing System | ||
RTP-150RL Rapid Thermal Annealing System with Three Sets Process Gases
RTP-150RL:
Is in the protection atmosphere of the desktop manual rapid annealing system, with infrared visible light heating single piece Wafer or sample, short process time, high temperature control precision, suitable for 2-6 inch wafer.Its unique cavity design, advanced temperature control technology and a unique RL900 software control system over conventional diffusion furnace annealing systems ensures excellent thermal uniformity compared with other RTP systems.
Product characteristics:
1. Infrared halogen lamp tube heating, cooling using air cooling.
2. Tube power PID temperature control, can accurately control the temperature heating, to ensure good reproducibility and temperature uniformity.
3. Parallel air intake method is adopted, and the inlet of gas is set on the Wafer surface to avoid cold points during the annealing process and ensure good temperature uniformity of the product.
4. Air and vacuum treatment methods can be selected, before the intake air gas purification treatment.
5. Standard with three sets of process gases.
6. The maximum size of a measurable single wafer sample is 6 inches (150mm).
7. The triple safety measures of furnace safety temperature opening protection, temperature controller opening authority protection and equipment emergency stop safety protection are adopted to ensure the safety of instruments.
Company Details
Business Type:
Manufacturer
Year Established:
2020
Employee Number:
>100
Ecer Certification：
Verified Supplier
Shanghai GaNova Electronic Information Co., Ltd. is a company specialized in broadband semiconductor technology related materials, equipment, testing and analysis services and technical advice. Founded in 2020, we are a wholly-owned subsidiary of Suzhou Nanowin Technology Co., Ltd. Our team has prof... Shanghai GaNova Electronic Information Co., Ltd. is a company specialized in broadband semiconductor technology related materials, equipment, testing and analysis services and technical advice. Founded in 2020, we are a wholly-owned subsidiary of Suzhou Nanowin Technology Co., Ltd. Our team has prof...
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